ZYGO 7702 8070-0102-01X Laser Interferometer Measurement Head
Maximize ROI
The Nexview™ 650 has been designed and built to ensure that the system
provides value for years to come. With a metrology area that accommodates
lateral dimensions up to 650 x 650 mm and sample load of > 100 kg,
a vertical range of 150 mm, and options for a fully enclosed, or partially
enclosed system, the Nexview™ 650 provides maximum flexibility for large
samples that require precision 3D optical profiling.
For example. The system accommodates:
Any of today’s standard PCB substrate panel sizes
Custom defined sample holders for flexible sheets, etc. which can be deployed
with little concern for their mass on the high load Y stage Large, high mass
injection molding plates that benefit from precise non-contact inspection to
minimize potential precision surface damage Customized chucks and sample
holders can be designed or customer supplied to adapt the system for smaller
panels or even singulated substrates to maximize application flexibility.
And the system’s integrated recipe-driven automation software enables
hands-free metrology of multiple features on each panel, all in a single
workstation, reducing production time and increasing process knowledge.
The Nexview™ 650 metrology system is an inspection tool for automated
measurement of injection molding tooling, PCBs, glass panels and other
samples requiring an extended work volume up to 650 x 650 mm.
It provides 2D & 3D measurements of a variety of surface features with
sub-nanometer vertical precision and sub-micron lateral precision.
Powerful Performance
Coherence Scanning Interferometry (CSI) is the measurement technology
at the core of the Nexview™ 650 system.
This non-contact technique provides high-precision, and high-value surface
metrology benefits including:
• Measures virtually all types of surfaces, from rough to super smooth,
including thin films, steep slopes, and large steps.
• Sub-nanometer measurement precision is independent of field magnification
• Gage capable performance – exceptional precision and repeatability for the
most demanding production applications.
• SureScan™ vibration tolerance technology – robust operation in virtually any
environment.
• Mx™ software enables seamless data exchange with other ZYGO Profilers
including ZeGage™ Pro, NewView™ 9000. and Nexview™ NX2.
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ZYGO 8070-0902-01X Laser Head
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Zygo ZMI-2002 Dual Axis 6U VME Measurement Board
ZYGO 8010-0105-01 Power Supply
Zygo 1115-801-346 laser head cable
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ZYGO 7702 8070-0102-01X Laser Interferometer Measurement Head
ZYGO 7702 8070-0102-35 Laser Interferometer Measurement Head
Zygo ZMI-2002 8020-0211 Dual Axis 6U VME Measurement Board