Applied Materials (AMAT) 0190-27072 High-Performance Semiconductor Interface
Applied Materials (AMAT) 0190-27072: High-Performance Semiconductor Interface
The Applied Materials (AMAT) 0190-27072 is a precision-engineered component designed for use in advanced semiconductor manufacturing equipment.
Specifically integrated into PVD (Physical Vapor Deposition) and Etch systems, this part serves as a critical interface or assembly component that ensures vacuum integrity and precise wafer processing.
Technical Parameter Table
| Parameter | Specification |
| Manufacturer | Applied Materials (AMAT) |
| Part Number | 0190-27072 |
| Component Type | Interface Assembly / Control Module |
| Material Composition | High-grade Aluminum / Ceramic / Stainless Steel |
| Operating Temperature | Standard Cleanroom Range (up to 150°C) |
| Compatibility | Endura, Centura, and Producer Platforms |
| Weight | Approximately 1.2 kg (varies by revision) |
| Standards Compliance | SEMI Standard, RoHS |
Product Advantages and Features
Exceptional Durability: Built to withstand the harsh plasma environments and corrosive gases common in semiconductor fabrication.
Plug-and-Play Integration: Designed specifically for AMAT tool architectures, ensuring minimal downtime during replacement.
Precision Engineering: High-tolerance machining prevents leaks and maintains the strict vacuum levels required for sub-7nm processing.
Contamination Control: Manufactured in ISO Class 1000 environments to ensure ultra-low particle generation.
Application Cases
PVD Metal Deposition: Used in AMAT Endura systems to maintain the stability of the deposition environment for titanium or aluminum layers.
Plasma Etching: Integrated into Centura platforms to assist in the precise routing of power or gas flows during critical dielectric etching.
Wafer Handling: Often acts as a foundational component for robotic interface assemblies that move wafers between vacuum chambers.
Unique Product Description
0190-27072
The AMAT 0190-27072 isn’t just a spare part; it is a “reliability insurance” for your cleanroom.
While generic alternatives exist, the 0190-27072 is calibrated to the exact thermal expansion coefficients and electrical impedances required by Applied Materials’ proprietary software.
This ensures that your system doesn’t just “run,” but performs at peak yield, minimizing the micro-vibrations and thermal drifts that lead to wafer defects.
Related & Other Models in the Same Series
Below are common components often utilized alongside or within the same assembly line as the 0190-27072:
AMAT 0190-00121: Power Supply Control Module.
AMAT 0190-20054: Sensor Interface Board.
AMAT 0010-20000: Process Chamber Assembly.
AMAT 0190-76142: Digital I/O Communication Card.
Installation and Maintenance
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Installation:
Ensure the tool is in Maintenance Mode and the chamber is at atmospheric pressure.
Check the O-rings or gaskets on the 0190-27072 for any microscopic tears.
Torque mounting bolts to the specific Newton-meter (Nm) specs provided in the tool manual to prevent stress fractures.
Maintenance: * Perform monthly visual inspections for “arcing” marks or chemical discoloration.
Clean only with approved isopropyl alcohol (IPA) and lint-free wipes.
Recalibrate the associated sensors every 500 “RF Hours” to ensure data accuracy.