AMAT 410-0198-1 Multi-Output Switching Power Supply
AMAT 410-0198-1 is a high-performance P5000/Centura System Power Supply (often manufactured by Pioneer Magnetics or Todd Products for Applied Materials).
This specialized DC power module is a fundamental component within the tool’s mainframe power distribution assembly, providing the stable, low-noise voltages required for CPU racks, sensor arrays, and vacuum control logic.
Technical Parameter Table
| Parameter | Specification |
| Part Number | 410-0198-1 |
| Manufacturer | Applied Materials (AMAT) / Pioneer Magnetics |
| Product Type | Multi-Output Switching Power Supply |
| Input Voltage | 180–264V AC, 47–63Hz (3-Phase or Single-Phase) |
| Output Voltages | +5V, +12V, -12V, +24V DC (Standard Config) |
| Output Power | 600W – 800W (Variant Dependent) |
| Cooling | Internal Forced Air (Integrated Fan) |
| Form Factor | Rack-Mountable Industrial Chassis |
Related Models
The 410-0198-1 is often part of a series of power modules found in legacy and transitional tools:
410-0198-2: Updated revision with higher amperage on the 24V rail.
0010-00228: Standard +/- 15V Power Supply for AMAT 8300 series.
0190-07906: MESA Power Supply Card (cPCI format).
0010-00172: Power Distribution Assembly (PDA) for P5000 platforms.
Application Cases
This power supply is the “electrical heart” for several critical subsystems:
Mainframe Logic: Powering the VME/cPCI backplanes that host the tool’s primary processing units.
Sensor Clusters: Providing stable 24V DC to pressure transducers (Baratrons) and optical wafer sensors.
Vacuum Control: Supplying the necessary current for solenoid valve manifolds and pneumatic logic controllers in the P5000 and Centura 5200 series.
Legacy Fab Support: Essential for maintaining 200mm fab lines where consistent power delivery is the primary factor in tool uptime.
Product Advantages and Features
Tight Voltage Regulation: Designed with very low ripple/noise specs to prevent logic errors in sensitive semiconductor controllers.
Industrial Durability: Engineered for continuous 24/7 operation in the demanding thermal environment of a fab sub-floor or tool cabinet.
Over-Voltage Protection (OVP): Includes hardware-level shutoff to protect expensive CPU boards and I/O cards from power spikes.
Modular Design: Features quick-disconnect connectors for rapid “swap-and-go” maintenance, minimizing tool downtime.
Other Models in the Same Series

The 410 Series of power components covers various AMAT hardware eras:
410-0100 Series: Early legacy DC power modules.
410-0200 Series: Enhanced power supplies for early 300mm transition tools.
410-0198-X: Specifically optimized for the P5000 and Centura mainframe architectures.
Installation and Maintenance
Installation: Ensure the main tool breaker is locked out. Slide the unit into its designated slot in the PDA (Power Distribution Assembly). Tighten the mounting screws to ensure a proper chassis ground before connecting the AC input.
Maintenance: The primary failure point is the internal cooling fan. Inspect the fan for dust accumulation every 6 months. A blocked fan will lead to thermal shutdown and intermittent tool crashes.
| WOODWARD | 5466-318 |
| WOODWARD | 5466-425 |
| WOODWARD | 8440-1706 A SPM-D11 |
| WOODWARD | 8440-1666 B |
| WOODWARD | 5437-1067A |
| WOODWARD | 5448-890 SPM-D10 |
| WOODWARD | 5501-465 |
| WOODWARD | 8901-457 |
| WOODWARD | 8200-1302 |
| WOODWARD | BUM60-1224-54-B-001-VC-A0-0093-0013-G003-0000 3522-1004 |
| WOODWARD | 8273-140 |
Troubleshooting: If the tool reports “Low Voltage” or “VME Bus Errors,” check the test points on the front of the unit. If any rail (5V, 12V, 24V) is off by more than 5%, the unit should be calibrated or replaced.
Warning: High Voltage. Internal capacitors store charge even after power is removed. Wait at least 5 minutes before opening the chassis for inspection.
Unique Product Description
The AMAT 410-0198-1 is the silent enabler of the P5000 and Centura platforms.
In the world of semiconductor manufacturing, “clean power” is as important as “clean air.” This unit ensures that the delicate electronics managing your wafer’s chemistry are never subject to the fluctuations of the facility’s power grid.
Its proven architecture is a testament to AMAT’s focus on reliability, making it a critical spare part for any facility operating legacy 200mm equipment.