AMAT 0190-17272 4-Channel Magnet Driver / Servo Controller

AMAT   0190-17272  4-Channel Magnet Driver / Servo Controller

1. Introduction

The AMAT 0190-17272 is a 4-Channel Magnet Driver assembly. In the context of Applied Materials’ tools, this unit serves as the power and control interface for electromagnetic coils used to manipulate plasma or wafer positioning

. By managing four independent channels, it provides the multi-axis magnetic field control necessary for uniform etching and deposition processes.

2. Technical Parameter Table

3. Related Models

The 0190-17272 is part of a specialized series of drivers and controllers found in high-end “E-Max” and “Enabler” tools. Related models include:

AMAT 0190-22543: MKS MacroNode Interface.

AMAT 0190-05111: Keyboard/Video/Mouse (KVM) Interface.

AMAT 0190-26019: EATON Powerware UPS Module.

AMAT 0010-06587: Supermicro Gen3 Server Assemblies (Mainframe Control).

4. Application Cases

Plasma Shaping (eMax CT+ Etchers): Used to drive magnets that confine and shape the DC/RF plasma, ensuring uniform etch rates across a 12″ (300mm) wafer.

Wafer Levitation/Positioning: Utilized in systems where magnetic fields are used to stabilize or rotate the wafer pedestal without physical contact.

Magnetic Neutral Loop Etch (NLD): Applied in processes requiring complex magnetic field geometries to achieve high selectivity in oxide etching.

5. Product Advantages and Features

Precision Multi-Channel Drive: Allows for synchronous control of four separate magnetic coils, enabling asymmetrical field adjustments.

Low Noise Output: Designed to minimize electromagnetic interference (EMI) with sensitive RF generators and sensors within the tool.

Kollmorgen Reliability: Built by Kollmorgen, a leader in motion control, ensuring high MTBF (Mean Time Between Failure) in 24/7 fab environments.

Compact Integration: Slim profile allows for dense mounting within the tool’s AC or RF rack.

6. Other Models in the Same Series

Within the Applied Materials 0190-XXXXX series, these units focus on electronic control and power distribution:

0190-17270: Single-channel driver variants.

0190-15100: Power Distribution Assemblies (PDA).

0190-20002: Digital I/O Control Boards.

7. Installation and Maintenance

Installation

Safety: Ensure the tool is in “Lockout/Tagout” (LOTO) state. High voltage may be present in the rack.

Mounting: Secure the driver using the integrated mounting brackets to the control rack. Ensure the heat sink has at least 2 inches of clearance for airflow.

Connection: Connect the 4-channel output harness first, followed by the control signals and primary power.

Maintenance

Thermal Inspection: Periodically check the heat sink for dust accumulation, which can cause thermal throttling.

Channel Calibration: Use the system diagnostic software to verify that the current output of each of the 4 channels matches the setpoint (typically measured in Amps).

8. Unique Product Description

The AMAT 0190-17272 is the “silent conductor” of the plasma chamber. While the RF generator provides the energy, this 4-channel driver provides the direction.

By precisely modulating the current to the magnetic coils, it allows the system to “steer” the plasma,

compensating for edge effects and ensuring that the billions of transistors on a wafer are etched with identical precision.