LEYBELOD TURBOVAC 361 (C) Suspension turbomolecular pump
Product-Information
TURBOVAC 361 (C) ClassicLine
Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage
Cat. No.: 85670
Product-Description
Typical Applications
• Leak detectors
• Mass spectrometers
• Data storage
• Optical coating
• R & D, e.g.
– UHV systems
– Particle accelerators• Load locks and transfer chambers
Technical Features
• Compact design
• Operation in any orientation
• Oil-free pump for generating clean high- and ultrahigh-vacuum conditions
Product-Information
TURBOVAC 361 (C) ClassicLine
Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage
Cat. No.: 85670
Description Unit Value
Fore vacuum connection DN 25 KF
Cooling Wasserkühlung
Pumping speed N2 according to PNEUROP l/s 345
Pumping speed Ar according to PNEUROP l/s 350
Pumping speed He according to PNEUROP l/s 340
Pumping speed H2 according to PNEUROP l/s 340
Max. gas throughput N2 mbar x l x s-1 3
Max. gas throughput Ar mbar x l x s-1 2.5
Compression ratio N2 1E9
Compression ratio He 6E4
Compression ratio H2 3E3
Ultimate pressure mbar < 1E-10
Max continuous inlet pressure, water cooled mbar 5E-2
Max. fore vacuum pressure for N2 mbar 5E-1
Recommended fore vacuum pump von TRIVAC D 16
B bis TRIVAC D
25 B
Run-up time to 95% min 2
Purge / Vent port DN 10 KF
Cooling water connection (hose nozzles) mm 10
Weight kg 12
Power consumption at ultimate pressure 50 / 60 Hz VA 680 / 48
Product-Information
TURBOVAC 361 (C) ClassicLine
Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage
Product-Information
TURBOVAC 361 (C) ClassicLine
Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage
Cat. No.: 85670
Product-Information
TURBOVAC 361 (C) ClassicLine
Turbomolecular Pumps with Mechanical Rotor Suspension without Compound Stage
Cat. No.: 85670