LAM 810-046015-010 VIOP III Multi-Functional I/O Processor – Phase 3

The LAM Research 810-046015-010 is a VIOP III (Versatile I/O Processor – Phase III) PCB board. In a semiconductor manufacturing cell, this board is a critical communication bridge that sits within a VMEbus rack to handle the complex inputs and outputs of the tool.

When paired with a KUKA KRC2 controller (as your previous parts list suggests), this board often acts as the primary hardware interface that translates high-speed wafer processing data into signals the robot can understand.

Technical Specifications
The VIOP III is a significant upgrade over older Phase II boards, offering faster signal processing and higher reliability in the electrically noisy environment of plasma etching.

Feature Details
Manufacturer LAM Research
Model VIOP III (Phase III)
Part Number 810-046015-010 (Revision B/C common)
Architecture VMEbus (Standard 6U Eurocard format)
Functions Sequential Control, Digital-Analog Conversion, Signal Processing
Compatibility Lam 2300 series, Alliance, and Exelan systems
Core Responsibilities
In your KUKA/LAM setup, this board typically manages:

Sequential Logic: It runs “ladder logic” style routines to ensure the robot only enters the chamber when all conditions (vacuum levels, gas flow, throttle valve position) are safe.

Precision Data Handling: It converts analog signals from sensors (like the PH1003-2840 logic power monitor or vacuum gauges) into digital data for the tool’s CPU.

Fault Redundancy: The VIOP III is designed with high fault tolerance to prevent “wafer drops” or robot collisions during unexpected power fluctuations.

Integration with KUKA KRC2
The workflow between the components you have identified usually looks like this:

DSE-IBS (00-117-336): The KUKA robot’s brain for motion.

VIOP III (810-046015-010): The LAM tool’s coordinator.

Communication: These two talk via a fieldbus (like Interbus or Profibus). The VIOP III tells the KUKA DSE card: “The chamber is vented and the slit valve is open. You are clear to enter.”

Troubleshooting Tips
Termination Resistors: This board is sensitive to signal reflections. Ensure that the inputs are correctly terminated (typically 1kΩ to 10kΩ resistors) as per LAM’s installation standards.

Shielding: Because it handles sensitive analog-to-digital conversions, the wiring must be individually shielded twisted-pair cables. If you are seeing “jittery” robot movements or intermittent I/O errors, check the shield ground connection.

Shorting Unused Inputs: A common cause of “phantom” errors on these boards is leaving unused inputs floating. They should be shorted together (Positive to Negative) to prevent noise induction.