AMAT 0190-24115 DeviceNet I/O Interface Card

AMAT 0190-24115 is a high-performance DeviceNet I/O Interface Card manufactured by MKS Instruments (Model CDN391R) for Applied Materials.

Built on the VMEbus architecture, this module acts as a critical communication gateway, allowing the tool’s central VME controller to manage distributed digital devices like pneumatic valves, mass flow controllers, and interlock sensors.

Technical Parameter Table

Related Models

The 0190-24115 is part of the “CDN” family of MKS-built interface boards for AMAT:

0190-27708: MKS CDN396R Analog I/O Board.

0190-30079: MKS CDN496R DeviceNet I/O PCB.

0190-08680: 2-Channel DeviceNet Scanner Module.

0100-11030: Motorola VME Processor Module (often the host for this card).

Application Cases

This VME-based card is primarily found in the control racks of legacy and transition-era 200mm and 300mm tools:

PVD & CVD Control: Orchestrating the digital “handshakes” required for wafer transport and chamber isolation in Endura and Centura platforms.

Pneumatic Management: Controlling the manifold of solenoid valves that operate chamber slit valves and lift pins.

Retrofit & Maintenance: Serving as a drop-in replacement for aging CDN391 series boards to restore stable network communication.

Product Advantages and Features

VMEbus Stability: Leverages the robust VME architecture known for its high immunity to electrical noise in industrial environments.

Deterministic Communication: Provides the precise timing required for DeviceNet protocols, ensuring sensor data and control commands are synchronized.

Direct Integration: Hard-coded compatibility with Applied Materials software environments, requiring minimal configuration upon installation.

Status Monitoring: Includes front-panel LED indicators for quick visual diagnostics of Module Status (MS) and Network Status (NS).

Other Models in the Same Series

The 0190 Series contains various VME and CPCI communication modules:

0190-01XXX: Legacy Serial and Parallel interface cards.

0190-25905: MKS CDN396R PCB.

0190-28651: CPCI-3840 Single Board Computer.

Installation and Maintenance

Installation: Power down the VME chassis before insertion. Align the card with the rack guides and press firmly until the DIN connectors seat fully into the backplane. Tighten the top and bottom retaining screws to ensure proper grounding.

Baud Rate Setup: Ensure the hardware switches (if applicable) or software parameters match the existing DeviceNet network speed (e.g., 500k).

Maintenance: Periodically check the DeviceNet trunk cable for secure connections. Communication “drops” are often caused by loose terminal resistors or cable strain at the card’s front-facing port.

ESD Caution: This board is highly sensitive to static. Only handle using an ESD wrist strap and store in a silver anti-static bag.

Unique Product Description

The AMAT 0190-24115 (MKS CDN391R) is the essential “digital translator” for the VME control rack. While the processor makes the decisions, this board provides the physical and logical bridge to the chamber’s hardware.

Specifically optimized for the high-uptime requirements of semiconductor fabs, the CDN391R architecture ensures that critical signals—from vacuum interlocks to valve triggers—move with the reliability and speed demanded by modern wafer processing.