AMAT 0161-57042 AKT framework

AMAT 0161-57042 is a specialized precision component manufactured by Applied Materials (AMAT),

a global leader in materials engineering solutions for the semiconductor, flat panel display, and solar industries.

This specific part is typically associated with vacuum systems and gas delivery modules within advanced processing tools.

Introduction

The AMAT 0161-57042 serves as a critical link in the semiconductor fabrication process.

Designed for high-reliability environments, it is engineered to withstand the rigorous thermal and chemical demands of wafer processing.

Whether used in CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), or Etch chambers, this component ensures system integrity and process repeatability.

Technical Parameter Table

While specific internal tolerances are proprietary, the general specifications for this class of AMAT components are as follows:

Related Models

The 0161-57042 often works in tandem with or is a variation of the following AMAT part series:

0161-XXXXX Series: Generally refers to gas line components or vacuum manifold assemblies.

0010-XXXXX: Chamber body components.

0040-XXXXX: Robotic assembly and wafer handling parts.

Application Cases

Thin Film Deposition: Ensuring precise gas flow and pressure control during the layering of conductive materials.

Plasma Etching: Maintaining structural integrity against corrosive plasma gases used to define circuit patterns.

Retrofitting & Upgrades: Utilized by fabrication facilities (Fabs) to extend the lifecycle of legacy Centura or Endura platforms.

Product Advantages and Features

High Chemical Resistance: Treated surfaces prevent degradation from aggressive precursor gases.

Precision Engineering: Manufactured to sub-micron tolerances to ensure a perfect fit, reducing “Mean Time Between Failure” (MTBF).

OEM Reliability: As an original equipment manufacturer part, it guarantees seamless integration without the calibration issues often found in third-party alternatives.

Thermal Stability: Designed to maintain its physical properties under rapid temperature fluctuations.

Other Models in the Same Series

AMAT 0161-57041: (Standard configuration)

AMAT 0161-57043: (High-flow variant)

AMAT 0161-20124: (Legacy equivalent)

Installation and Maintenance

Warning: Installation should only be performed by certified field service engineers.

Depressurization: Ensure the chamber is fully vented and at atmospheric pressure.

Inspection: Check all sealing surfaces for microscopic scratches or particulate matter.

Torque Specs: Tighten fasteners according to the specific AMAT tool manual to avoid flange deformation.

Leak Testing: Perform a helium leak check (standard sensitivity $1 \times 10^{-9} \text{ std.cc/sec}$) before resuming production.

Unique Product Description

The AMAT 0161-57042 isn’t just a spare part; it is the “silent guardian” of the vacuum seal.

In an industry where a single particle of dust can ruin a multimillion-dollar wafer, this component provides the mechanical certainty required for 24/7 manufacturing.

Its specialized coating and robust architecture make it a preferred choice for Fabs looking to minimize downtime and maximize yield.