AMAT 0190-26769 high-performance Universal Vacuum Gauge
Introduction
The AMAT 0190-26769 is a high-performance Universal Vacuum Gauge (also categorized as a Universal Pirani Gauge) designed for the Applied Materials 300mm and 200mm platforms.
This gauge is a critical diagnostic and control component used to monitor vacuum levels in load locks, transfer chambers, and process modules.
By providing real-time pressure feedback to the tool’s central controller, it ensures that wafers are only moved or processed when the environment reaches the exact sub-atmospheric specifications required for contamination-free fabrication.
Technical Parameter Table
| Parameter | Specification |
| Manufacturer | Applied Materials (AMAT) |
| Part Number | 0190-26769 |
| Component Type | Universal Vacuum / Pirani Gauge |
| Measurement Range | $1 \times 10^{-1}$ to $1$ Torr (Typical Calibration) |
| Full Range Capability | Up to 101.325 kPa (Atmospheric) |
| Accuracy | $\pm 1\%$ of reading |
| Response Time | $\approx 2$ seconds at 1 Torr |
| Operating Temp | $-20°C$ to $+50°C$ |
| Material | Stainless Steel Body for Chemical Compatibility |
| Output Signal | $0.775$ to $10.13V$ (Model Dependent) |
Product Advantages and Features
Universal Compatibility: Designed to interface seamlessly with standard AMAT sensing racks and digital-to-analog converters.
High Sensitivity: Capable of detecting pressure fluctuations as small as 0.1 Torr, allowing for the early detection of micro-leaks in the vacuum seals.
Corrosion Resistance: The stainless steel construction ensures durability against the specialty gases and precursors used in CVD and Etch processes.
Compact Integration: Small form factor allows for installation in tight chamber-top or foreline configurations without obstructing other maintenance access points.
0190-26769
Application Cases
Load Lock Monitoring: Ensuring the load lock is fully vented or pumped down before the slit valve opens, preventing atmospheric “burps” into the transfer chamber.
Foreline Pressure Control: Monitoring the efficiency of dry pumps and turbomolecular pumps by measuring the backing pressure in the exhaust lines.
Safety Interlocks: Providing the critical “Vacuum OK” signal required by the system software to enable high-voltage RF generators or hazardous gas flows.
Other Models in the Same Series
The 0190-series includes a wide variety of vacuum and thermal sensing components:
| Part Number | Description |
| 0190-26328 | Hot Ion Pirani Gauge |
| 0190-09900 | Standard Hot Ion/Pirani Gauge |
| 0190-22145 | Hot Ion Pirani Gauge (Module Only) |
| 0190-26463 | Temperature Control Module |
Unique Product Description
The AMAT 0190-26769 serves as the “eyes” of the vacuum system.
In an industry where a single loose seal can lead to millions of dollars in scrapped wafers, the 0190-26769 offers the high-resolution data needed to maintain a pristine process environment.
While many gauges drift over time, this universal model is engineered for long-term calibration stability,
making it a staple for high-volume manufacturing (HVM) sites that prioritize tool “uptime” and repeatable vacuum performance.
Installation and Maintenance
Installation: Ensure the O-ring or VCR gasket is brand new before mounting the gauge to the vacuum port.
Hand-tighten the connection first, then follow OEM torque specifications to avoid over-compressing the seal.
Calibration: This gauge should be zeroed at high vacuum (below its base measurement range) to ensure the accuracy of the $0.775V$ to $10.13V$ output slope.
Maintenance: Inspect the sensor filament periodically.
If the gauge is exposed to high-vapor-pressure precursors, it may require a “bake-out” or replacement if the readings begin to drift due to material deposition on the internal sensor.
ESD Safety: Always handle the electrical connector with an ESD-safe wrist strap to protect the internal signal-conditioning electronics.