AMAT 0010-17261 Temperature Control (TC) Module

Introduction

The AMAT 0010-17261 is a specialized TC (Temperature Control) Module engineered for the Applied Materials Centura and Endura platforms.

It serves as a precision interface between the system’s central controller and the heating/cooling elements of the process chamber.

By utilizing advanced thermal feedback loops, the 0010-17261 ensures that the wafer pedestal or chamber walls maintain exact temperature setpoints,

which is vital for chemical vapor deposition (CVD) and etching processes where thermal stability directly impacts film uniformity.

Technical Parameter Table

0010-17261

Product Advantages and Features

High-Resolution Monitoring: Capable of processing micro-fluctuations in thermocouple data to provide real-time thermal corrections.

Thermal Safety Interlocks: Features integrated hardware limits to prevent “runaway” heating, protecting both the expensive process chamber and the wafer batch.

Industrial Hardening: Designed to withstand the electromagnetic interference (EMI) common in plasma-enhanced environments (PECVD/Etch).

Plug-and-Play Integration: Fully compatible with standard AMAT card cages, allowing for rapid hot-swap replacement during maintenance cycles.

Application Cases

CVD Chamber Regulation: Maintaining the susceptor temperature during Chemical Vapor Deposition to ensure consistent gas-to-solid reaction rates across the wafer surface.

Pedestal Heating: Controlling the resistive heating elements in high-temperature 300mm wafer pedestals.

Retrofit Projects: Utilized in the refurbishment of legacy P5000 or Centura 5200 systems to bring thermal control precision up to modern fabrication standards.

Related Models in the Same Series

The 0010-series includes various modules designed for the AMAT system backplane:

Model / Part Number    Description

0010-04926    HV (High Voltage) Module CESC

0010-25274    Fast Data Collector Module

0010-25273    Fast Data Gateway

0010-17262    Variant TC Module (Specific to high-flow gas heating)

Unique Product Description

The AMAT 0010-17261 is the definitive choice for facilities requiring absolute thermal repeatability.

Unlike generic industrial temperature controllers, the 0010-17261 is purpose-built for the vacuum-sealed, high-stakes environment of semiconductor manufacturing.

Its logic is optimized for the specific lag-times of AMAT heater jackets and pedestals, eliminating the “overshoot” that can compromise sensitive thin-film layers.

This module is an essential link in the “golden tool” configuration for leading-edge fabs.

Installation and Maintenance

Installation: Before insertion, verify that the card edge connectors are free of oxidation or debris. Align the module with the guide rails in the controller rack and push firmly until the locking levers engage.

Calibration: Following installation, perform a software-level thermal loop calibration via the system interface to sync the module with the chamber’s specific thermocouples.

Maintenance: Periodically check the diagnostic LEDs on the front panel.

A “Fault” or “Limit” light typically indicates a failing thermocouple or a break in the heater circuit rather than a failure of the module itself.