Yaskawa

WATLOW 996D-11CC-CUGR Single-loop digital controller

Watlow 996D-11CC-CUGR is a highly specialized, 24VDC variant of the Series 996 single-loop digital controller.

Specifically engineered as an Original Equipment Manufacturer (OEM) component, this model was designed for the rigorous thermal demands of semiconductor tooling and wafer processing equipment.

1. Introduction

The 996D-11CC-CUGR is a precision temperature and process controller tailored for the “Thermal Loop” within semiconductor fabrication environments.

Unlike standard industrial controllers, the CUGR suffix indicates a custom firmware set and hardware calibration optimized for high-speed, low-voltage (24VDC) operation.

It manages a single control loop with surgical accuracy, ensuring the stability required for chemical delivery and bake-out processes where power safety and footprint are paramount.

2. Technical Parameter Table

Feature Specification
Control Loops 1 Independent Loop
Supply Voltage 24 to 28 VDC
Input Type Universal (Thermocouple J, K, T, N, E, R, S, B; RTD; 4-20mA)
Outputs (11CC) Dual Switched DC (Common for SSR/Power Module Drive)
Accuracy $\pm 0.1\%$ of Span
Sampling Rate 10Hz (100ms update)
Communication EIA-232 / EIA-485 Modbus RTU
Mounting 1/8 DIN Chassis or Panel Mount
Special Code (CUGR) Specialized OEM Firmware / Custom Tuning

3. Product Advantages and Features

OEM Customization (CUGR): Factory-set parameters designed specifically for semiconductor “sub-fab” and tool-level heating applications, reducing the need for field auto-tuning.

Low Voltage Safety: Designed for 24VDC operation, aligning with the safety standards of modern semiconductor tool cabinets and eliminating the need for high-voltage AC routing.

Digital Stability: Features a high-resolution A/D converter that maintains setpoint stability even in the presence of high-frequency noise from vacuum pumps and RF generators.

Compact Integration: The 1/8 DIN vertical form factor allows it to be integrated into high-density control racks with ease.

4. Application Cases

Wafer Track Systems: Precision control of specialized “Chill” or “Bake” plates where 24VDC power is the standard.

Gas Line Heat Tracing: Maintaining precursors at a precise temperature to prevent condensation in high-vacuum environments.

Photoresist Stripping: Managing the temperature of chemical baths in semiconductor cleaning tools.

Medical Diagnostic Platforms: Used in laboratory equipment where low-voltage DC operation is required for patient/operator safety.

5. Other Models in the Same Series

996D-11CC-NSRG: A digital variant with different OEM tuning parameters.

996A: The analog-only variant without the local VFD/LED interface.

997D: The dual-channel successor often used to replace two 996D units in newer tool revisions.

998D / 999D: The advanced 1/8 DIN variants featuring enhanced logic for cascade control.

996D-11CC-CUGR

6. Installation and Maintenance

Installation

Power Wiring: Connect to a stable, regulated 24VDC power source. Ensure the polarity is correct at terminals 8 (+) and 9 (-) to avoid damaging the internal DC-DC converter.

Output Setup: The “11CC” code typically denotes Switched DC outputs. These should be wired directly to the input side of a Solid State Relay (SSR) or a Watlow DIN-A-MITE power controller.

Shielding: Use twisted-pair, shielded cable for all thermocouple inputs, grounding the shield only at the controller side to minimize “common mode” electrical noise.

Maintenance

Firmware Verification: If replacing a unit, ensure the replacement is also a CUGR variant.

Using a standard 996D may result in different PID response characteristics due to custom OEM mapping.

Terminal Integrity: Periodically inspect screw terminals for oxidation, especially in environments utilizing corrosive chemicals (common in semi-fab).

Memory Backup: Before replacing a unit, document the PID parameters (Proportional, Integral, Derivative) as the custom firmware may have specific non-default starting values.

7. Unique Product Description

“The Watlow 996D-11CC-CUGR is the specialist’s choice for the semiconductor floor.

By combining a 24VDC safe-power architecture with surgical-grade 10Hz PID processing, it delivers the consistent thermal accuracy required to manufacture the world’s most advanced microchips. It isn’t just a controller; it is a legacy component designed to keep high-value silicon wafers safe and stable.”

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