AMAT 0010-78680 Pneumatic control module

The part number 0010-78680 refers to a specialized component from Applied Materials (AMAT), the global leader in semiconductor, display, and solar manufacturing equipment.

Based on AMAT’s technical nomenclature, this part is typically identified as a Pneumatic Solenoid Valve Manifold or a Gas/Pneumatic Control Assembly used within the Endura, Centura, or Producer platforms (which are the industry standards for PVD, CVD, and Etch processes).

1.Introduction

The AMAT 0010-78680 is a precision-engineered pneumatic control module designed for semiconductor fabrication tools. It acts as the “nervous system” for the vacuum chamber’s mechanical movements, controlling the actuation of slit valves, lift pins, and gas flow shutters. Because semiconductor manufacturing requires ultra-high vacuum (UHV) environments and zero contamination, this component is built to withstand millions of cycles with extreme repeatability and minimal particle generation.

2. Technical Parameter Table

3. Related Models

This part belongs to a family of pneumatic assemblies often used in specific AMAT tool configurations:

0010-76001: Similar pneumatic manifold used in earlier Centura models.

0010-20123: Solenoid valve used for chamber venting.

0010-35000 Series: Various pneumatic controllers for the Endura platform.

0190-XXXXX Series: Often represents the individual valves mounted onto the 0010-78680 manifold.

4. Application Cases

Wafer Handling: Controlling the pneumatic cylinders that move the “Robot Arm” or “Slit Valve” which allows wafers to pass between the Load Lock and the Process Chamber.

Chamber Sequencing: Managing the lift pin assembly that raises and lowers the wafer onto the electrostatic chuck (ESC).

Process Gas Control: Operating the pneumatic actuators for gas box valves to ensure precise timing of precursor gas delivery during CVD (Chemical Vapor Deposition).

5. Product Advantages and Features

High Reliability: Engineered for high-volume manufacturing (HVM) where tool downtime costs thousands of dollars per minute.

Plug-and-Play Integration: Specifically keyed for AMAT’s proprietary wiring harnesses and software interfaces.

Cleanroom Compatible: Materials are selected to ensure they do not outgas or shed particles that could ruin a silicon wafer.

Integrated Diagnostics: Often includes LED status indicators for each solenoid to allow for rapid troubleshooting by field service engineers.

6. Other Models in the Same Series (AMAT Control Modules)

AMAT 0010-XXXXX: Mechanical/Pneumatic Assemblies.

AMAT 0020-XXXXX: Quartz and Ceramic Consumables.

AMAT 0040-XXXXX: Power Distribution and Cables.

AMAT 0190-XXXXX: Individual Gas/Pneumatic Valves (often sourced from SMC or Nor-Cal to AMAT specs).