LAM 810-046015-010 Control board card
LAM Research 810-046015-010 is a key control board card belonging to the VIOP III (Versatile I/O Processor-Phase III) platform.
In semiconductor manufacturing equipment (such as the LAM 2300 series and Alliance series), it serves as the “nerve endings” of the entire system, responsible for high-speed exchange of complex process sensor data with the main control system.
Combined with the KUKA KRC2 component you queried earlier, this board card is usually responsible for managing the real-time handshake signals between the robot and the wafer processing Chamber.
Core specifications and technical positioning
Feature description
Model name: VIOP III (Versatile I/O Processor, Phase 3)
Product Number: 810-046015-010
The bus architecture follows the VMEbus standard
The application equipment includes Lam 2300 Flex, Kiyo, Exelan and Alliance machines
The main functions are digital/analog signal processing, Interlock logic execution, and communication gateway
Why is it important in the KUKA robot system?
In semiconductor machines integrated with KUKA robots, the 810-046015-010 plays the role of a “translator” and a “security gatekeeper” :
Action synchronization: When the DSE-IBS (00-117-336) of the KUKA robot issues a motion request, the VIOP III board card will check the pressure in the chamber, the status of the valves, and the wafer sensor signals. Only after confirming that there are no errors will it grant the permission of “entry allowed”.
High-speed I/O processing: This board card can process the Wafer Mapping detection signal with a response speed of microseconds, ensuring that no collision occurs when the robot is grasping the wafer at high speed.
Power supply dependency: Its logic power supply usually comes from the PH1003-2840 power supply you mentioned earlier. If the 27V output of the power supply is unstable, the VIOP III is often the first component to report an error, causing the VME bus communication to be interrupted.
Common Fault Diagnosis (Troubleshooting
If this board card malfunctions, the system usually pops up the following alarm:
“VME Communication Timeout” : The main control computer cannot find the board card through the bus.
“I/O Mapping Error” : Input/output address mapping fails, usually due to improper setting of the DIP Switch on the board or firmware damage.
“Interlock Violation” : Security interlock error. Even if the physical conditions are met, a broken VIOP III will falsely report a signal failure, causing the robot to be unable to move.
Inspection suggestions
Gold finger cleaning: When VME boards are exposed to high temperatures and micro-vibrations for a long time, the gold fingers are prone to oxidation. Wiping with anhydrous alcohol and then plugging and unplugging can usually solve 50% of communication problems.
Capacitor aging: After long-term use of the 810-046015 series board cards, the on-board filter capacitors may bulge, resulting in an increase in signal noise.